October 12, 2009
7:00am-5:00pm

Room: 2168 A.V. Williams Conference Room
Bldg: A.V. Williams Building (Bldg. 045)
University of Maryland
College Park, MD 20742
Directions and Parking Information

*Seating is limited*

Dr. Ravi Doraiswami (ravidsw@calce.umd.edu)
$300 ($200 for consortium members)

What is MEMS Technology?

Micro-electro-mechanical systems (MEMS) is the integration of micro mechanical elements, sensors, actuators, and electronic devices are integrated on a common silicon substrate through microfabrication technology. While the electronic devices are fabricated using integrated circuit process sequences (e.g., CMOS, Bipolar, or BICMOS processes), the micromechanical components are fabricated using compatible “micromachining” processes that selectively etch away parts of the silicon wafer or add new structural layers to form the electromechanical devices. Explore the cutting of edge of MEMS reliability with CALCE’s, MEMS Reliability Workshop. In this course you will gain the needed foundation in materials characterization, MEMS fabrication, integration, and reliability testing for the next generation of MEMS sensors in embedded systems. This workshop provides engineers and scientists with an in-depth knowledge in MEMS sensor reliability bridging the gap between MEMS research concepts and commercialization through sequential identification, accelerated lifetime testing, and elimination of MEMS-specific chip-level and package-level failure modes. The course also provides an up-to-date knowledge base in chip scale processes for reliability of RF MEMS, enabling SOP, SIP and SOC systems.

Our one-day workshop connects all facets of MEMS Reliability and its application as sensors. It takes you through the three steps of MEMS reliability testing:

• Micromechanical systems realization
• Sensor packages
• Reliability testing and failure analysis of MEMS sensor packages

Agenda

How You Will Benefit

Discover how your company/research fits into the big picture of MEMS

• Gain expert case based application experience
• Discover where to focus new research
  • Telecommunication
  • Aerospace
  • Defense
  • Energy harvesting
  • Agriculture and biomedical
  • Transportation
  • Homeland security
  • Environmental and disease identification
• Network with CALCE experts and industry professionals, and develop contacts who can help you in developing products
• Be on the forefront of MEMS reliability research
• Recruit and network with students working on the cutting edge of systems reliability
• Get exposed to CALCE’s state-of-the-art research facilities

Download Regisration Form